Flow Rate Nikon Nsr-S620d Mass Flow Controller Range Regulator Ss Pressure Regulator Ss Ap Tech Pcb Amat Mass Flow Controller Gas Mass Flow Controller Gas O2 Flow Card Amat ½ Flaretek Amat Assy Semitool Mass Flow Controller Gas N2 Flow Astex Asml 4022 Psi Max Inlet Board Amat Pcb Assy Svg Thermco Asyst Technologies Aviza Interface Pcb Throttle Valve Kla Tencor Lam Research Rf Power Supply Brooks Automation Inlet 3500 Psi Gas N2 Huge Lot Of Ultra Industrial Medical Industrial Medical Vinyl Surplus Marking Tape Ultra Industrial Medical Vinyl Surplus Marking Tel Tokyo Electron Thermco Svg 90S Asml Silicon Valley Mass Flow Controller Valve 13 56 Mhz Pressure Transducer Type Heater Jacket Interlock Pcb Genmark Psi Maximum Needle Valve 1 Max Inlet Flaretek 1 Controller Valve Advanced Energy Mirra Amat Seiko Seiki Baratron Pressure Transducer Vimec Valve Needle Valve Mks Baratron Pri Automation Rebuilt 90 Day Warranty Pcb Pn Flow Controller Gas O2 Flow Rate Regulator Ss Maximum Inlet Scp Global Hp Robot Gas Sf6 Mass Flow Controller Gas Cf4 Flow Watkins Johnson Wafer Transfer Kulicke Soffa Gas Sih4 Magnetron Head Sbc Single Board Matching Network Process Station Applied Materials Amat Opal Nikon Nsr 600 E2 Psig Max Pcb Assembly Boc Edwards Focus Ring Diaphragm Valve Pcb Card Flow Controller Gas Cf4 Flow Rate Axis Board Single Board Computer Vacuum Chamber Controller Pcb Manometer Mks Instruments Opti-Probe 2600B Dry Pump Flow Controller Gas N2 Flow Rate Cnc 432 Model Pressure Regulator Ss 3500 Psi Max Controller Pcb Card Ge Intelligent Platform Vme-7671-421000 Sbc Single Intelligent Platform Vme-7671-421000 Sbc Single Board Cable Devicenet Length Nikon Nsr-S620d Used Untested Platform Vme-7671-421000 Sbc Single Board Comp Vme-7671-421000 Sbc Single Board Comp 605-048878-001 1 Lot Of 4 100 Psi 2-Way Valve 50 60Hz 60 Hz 74Ls 81.186.5545 90 Day Warranty Ac Motor Ac Servo Acting 12 Applied Materials Applied Materials Amat Applied Materials Screws Bearing Board Board Assembly Board Assy Board Rev Brushless Business Ca Cable Assembly Capacitive Manometer Carbon Graphite Card Board Ceramic Ceramic Sealant Chuck Circuit Board Circuit Breaker Clamp Cnc Cnc Kids Cnc Router Co Ltd Controller Board Controller Module Controller Panels Controller Unit Diffusion Furnace Driver Board Dryer Epsilon 3000 Controller Rack Fiber Optic Flow Meter Gate Valve Hotplate Induction Industrial Instrument Kit Interface Board Lam Laser Leitz Link Clamp Machines Compressed Motion Controller Motor Motors Controller Mpm Ultra-Print 200 Stencil Printers Novellus System Old Omron Plc Paper Pc Board Pcb Pcb Board Pcb Rev Pdr Power Cable Power Supply Pressure Regulator Pressure Switch Pressure Transducer Psi Max Pump Controller Quad Recif Rf Generator Robot Robot Controller Robot Kit Saw Servo Motors Sold As-Is Solenoid Valve Stainless Steel Stepping Motor System Controller Tdk Temperature Controller Thermco System Thermocouple Thermostats Tool Kit Trapped Turbo Pump Used Vacuum Pump Vacuum Gauge Vacuum Pump Vacuum System
 In 
 
Order by: 
Available to: 
Price: 
 - 
eBay Affiliate Links
$
150.00
Buy It Now
$14.50 Shipping
Condition: New
Location: Billings, United States
AMAT, Vacuum Fitting, 0050-33687, New.
$
664.05
Buy It Now
$73.58 Shipping
Condition: Used
Location: Goleta, United States
Nor-Cal Products 3-Way Tee Load Lock High Vacuum Chamber, 10" Flange OD (8218)W Good cosmetic condition with some signs of use. Has some scratch and scuff ... moremarks. We believe this Nor-Cal Products brand but not certain. See pictures for more detail.
$
999.99
Buy It Now
Free Shipping
Condition: New
Location: Phoenix, United States
Specifications are from ASM and may vary slightly due to upgrades, options, or revisions this unit may or may not have.
$
999.99
Buy It Now
Free Shipping
Condition: New
Location: Phoenix, United States
Specifications are from ASM and may vary slightly due to upgrades, options, or revisions this unit may or may not have.
$
2749.99
Buy It Now
Condition: New
Location: Phoenix, United States
Part Number: 720538700 (also says D720538700). Specifications are from MKS and may vary slightly due to upgrades, options, or revisions this unit may ... moreor may not have. Chamber: 39.25" x 24.75" x 5.5".
$
2.99
Buy It Now
$5.45 Shipping
Condition: New
Location: Hillsborough, United States
KF-25 Wing Nut Clamp Parts are stainless steel or aluminum construction. If you don't see your item here. Please contact us. We can get almost everything ... morein vacuum fittings. We sell 20% below Nor-Cal's catalog price every day. Powered by.RcmdId ViewItemDescV4,RlogId p4%60bo7%60jtb9%3Fuk.rp*60c23f%60%3E-13df4995d75-0xfc-
$
2.99
Buy It Now
$5.45 Shipping
Condition: New
Location: Hillsborough, United States
Search our eBay Store! 20) MKS HPS ISO NW KF 16 25 40 50 Wing Nut Toggle Aluminum Vacuum Flange Clamp SKU: JV-TER-A-L20CLAMP Condition: Used Packaging: ... moreOEM Warranty: 30-Day DOA Warranty This auction only comes with what is pictured or listed in the description. All parts. Accessories, cables, etc. are not included unless pictured or described. If in doubt, please contact us before purchasing. Click an Image to Enlarge Lot of 20 MKS HPS ISO KF-16/25/40/50 Wing Nut& Toggle Aluminum Clamps Physical Condition: All clamps are in good condition. A few of the toggle clamps have slight rust on the springs. Listing Includes: 1x MKS HPS KF16 Wing Nut Clamp(Aluminum) 1x MKS HPS KF16 Toggle Clamp(Aluminum) 4x MKS HPS KF25 Wing Nut Clamps(Aluminum) 1x MKS HPS KF40 Wing Nut Clamp(Aluminum) 7x MKS HPS KF40 Toggle Clamps(Aluminum) 4x MKS HPS KF50 Wing Nut Clamps(Aluminum) 2x MKS HPS KF50 Toggle Clamps(Aluminum) EXTRAS CLAMPS INCLUDED IN THIS LISTING* 1x Non-Branded KF25 Wing Nut Clamp(Aluminum) 2x Norcal KF40 Latch/Toggle Clamps(Aluminum) 7x Non-Branded KF40 Wing Nut Clamps(Aluminum) 1x Non-Branded KF50 Wing Nut Clamp(Aluminum) PLEASE NOTE. THE FDA DISCLAIMER BELOW IS FOR MEDICAL DEVICES/EQUIPMENT REQUIRING GOVERNMENT AUTHORIZATION: SVC ASSET MANAGEMENT. INC. MILPITAS. CA 95035(877)757-3863"The sale of this item may be subject to regulation by the U.S. Food and Drug Administration and state and local regulatory agencies. If so. Do not bid on this item unless you are an authorized purchaser. If the item is subject to FDA regulation, we will verify your status as an authorized purchaser of this item before shipping of the item. This unit has been used. It has been cleaned in accordance with the manufacturers guidelines by the medical facility from which we received it. All parts. Accessories, cables, etc. are not included unless pictured or listed in the description. If you require more information and specifications. Please contact the manufacturer and/or research online. As a liquidation house, we're
$
2.99
Buy It Now
$6.90 Shipping
Condition: New
Location: Hillsborough, United States
KF-50 Wing Nut Clamp Parts are stainless steel or aluminum construction. If you don't see your item here. Please contact us. We can get almost everything ... morein vacuum fittings. We sell 20% below Nor-Cal's catalog price every day. Powered by
$
2.99
Buy It Now
$5.45 Shipping
Condition: New
Location: Hillsborough, United States
Search our eBay Store! 20) MKS HPS ISO NW KF 16 25 40 50 Wing Nut Toggle Aluminum Vacuum Flange Clamp SKU: JV-TER-A-L20CLAMP Condition: Used Packaging: ... moreOEM Warranty: 30-Day DOA Warranty This auction only comes with what is pictured or listed in the description. All parts. Accessories, cables, etc. are not included unless pictured or described. If in doubt, please contact us before purchasing. Click an Image to Enlarge Lot of 20 MKS HPS ISO KF-16/25/40/50 Wing Nut& Toggle Aluminum Clamps Physical Condition: All clamps are in good condition. A few of the toggle clamps have slight rust on the springs. Listing Includes: 1x MKS HPS KF16 Wing Nut Clamp(Aluminum) 1x MKS HPS KF16 Toggle Clamp(Aluminum) 4x MKS HPS KF25 Wing Nut Clamps(Aluminum) 1x MKS HPS KF40 Wing Nut Clamp(Aluminum) 7x MKS HPS KF40 Toggle Clamps(Aluminum) 4x MKS HPS KF50 Wing Nut Clamps(Aluminum) 2x MKS HPS KF50 Toggle Clamps(Aluminum) EXTRAS CLAMPS INCLUDED IN THIS LISTING* 1x Non-Branded KF25 Wing Nut Clamp(Aluminum) 2x Norcal KF40 Latch/Toggle Clamps(Aluminum) 7x Non-Branded KF40 Wing Nut Clamps(Aluminum) 1x Non-Branded KF50 Wing Nut Clamp(Aluminum) PLEASE NOTE. THE FDA DISCLAIMER BELOW IS FOR MEDICAL DEVICES/EQUIPMENT REQUIRING GOVERNMENT AUTHORIZATION: SVC ASSET MANAGEMENT. INC. MILPITAS. CA 95035(877)757-3863"The sale of this item may be subject to regulation by the U.S. Food and Drug Administration and state and local regulatory agencies. If so. Do not bid on this item unless you are an authorized purchaser. If the item is subject to FDA regulation, we will verify your status as an authorized purchaser of this item before shipping of the item. This unit has been used. It has been cleaned in accordance with the manufacturers guidelines by the medical facility from which we received it. All parts. Accessories, cables, etc. are not included unless pictured or listed in the description. If you require more information and specifications. Please contact the manufacturer and/or research online. As a liquidation house, we're
$
3280.00
Buy It Now
Condition: Used
Location: Fitchburg, United States
Complete with round sputter cathode for 120 mm substrates. Vacuum chamber with 3 top side ports for cathode and 2 load/locks for 120 mm flat substrates. ... moreChamber height can be modified to handle deeper substrates.
$
2950.00
Buy It Now
$117.72 Shipping
Condition: New – Open box
Location: Palisades Park, United States
8”CHAFA01 WDE Kit. Motorola Mos12 P5000 Endura 5500/. Sheild Kit No.: Tosoh SET-819-1B4KR-C Motorola Mos12 P5000. Tosoh SET-819-1B4KR-C. Process Chamber: ... more8” CH A FAO1 WDE KIT. We are minutes from Manhattan, and local to all 3 New York City Area Airports.
$
2950.00
Buy It Now
$117.72 Shipping
Condition: New – Open box
Location: Palisades Park, United States
New In Box / Tosoh SET-805-1B4KR-SA. Endura 5500 / 8” 101 TIN KIT. Process Chamber: 8” 101 TIN KIT. We are minutes from Manhattan, and local to all 3 ... moreNew York City Area Airports. Sheild Kit No.: Set-805-1B4KR-SA.
$
93.47
Buy It Now
$19.99 Shipping
Condition: Used
Location: Goffstown, United States
The VacuLaz® system consists of a viewing module, a sensor and an electronics interface module. Depending on the application, aluminum is used in the ... moreconstruction of the viewing module with sapphire coated windows.
$
24.99
Buy It Now
$8.00 Shipping
Condition: New
Location: Boston, United States
This type of vacuum fitting is used for through or foreline vacuum plumbing and simple vacuum chambers. as KF (or Klein Flange). Centering Rings. NW80 ... morecentering rings. NW80 centering rings are. For use with vacuum flanges known.
$
1226.70
Buy It Now
$18.25 Shipping
Condition: New
Location: Apache Junction, United States
These are Nordiko part number A07639 commonly used on the rotating substrate table of 3600 style chambers. The part is a vacuum bellows which uses two ... moreflanges with o-ring seal grooves.
$
175.00
Buy It Now
$20.74 Shipping
Condition: New
Location: Milpitas, United States
Farmon ID 413549. Fastcom Faulhaber Federal Pioneer Federal Products Co. Futaba Futurestar Galil Motion GaSonics Gast GasTech Gaston Gates GC Valves GD ... moreCalifornia GE Fanuc GE General Electric GE Industrial Services Gems Sensors GEMU General Monitors General Precision General Scanning Genie Industries Genmark Automation GenRad Genwac Georg Fischer Geotest Gespac GF Signet Glassman Glentek Global Laser Gluton West Go Inc.Gould GPI General Precision GPI General Precision Inc.
$
1462.50
Buy It Now
$40.46 Shipping
Condition: New – Open box
Location: Milpitas, United States
AMAT 0040-00059 Standoff Cathode, Etch Chamber, Farmon ID 406664. Fastcom Faulhaber Federal Pioneer Federal Products Co. Futaba Futurestar Galil Motion ... moreGaSonics Gast GasTech Gaston Gates GC Valves GD California GE Fanuc GE General Electric GE Industrial Services Gems Sensors GEMU General Monitors General Precision General Scanning Genie Industries Genmark Automation GenRad Genwac Georg Fischer Geotest Gespac GF Signet Glassman Glentek Global Laser Gluton West Go Inc.Gould GPI General Precision GPI General Precision Inc.
$
1200.00
Buy It Now
$300.00 Shipping
Condition: Used
Location: Israel
SVG 9037S 28-543013-01-001 13-47454-01 99-47467-01 SVG90 VACUUM BAKE CHAMBER SVG Silicon Valley Group MODEL: 9037S PN: 28-543013-01-001 13-47454-01 99-47467-01 ... moreSVG90 VACUUM BAKE CHAMBER
$
800.00
Buy It Now
$85.00 Shipping
Condition: New – Open box
Location: Israel
Applied Materials / AMAT. VACUUM LINE CHAMBER TO TURBO.
$
191.50
Buy It Now
$14.75 Shipping
Condition: Used
Location: Dallas, United States
Search our eBay Store! Particle Measuring Systems Vaculaz Interface Module Sensor Tester Analyzer SKU: JV-MAT-C-PMSVACULAZ Condition: Used Packaging: ... moreOEM Warranty: 30 day DOA Warranty This auction only comes with what is pictured or listed in the description. All parts. Accessories, cables, etc. are only included if pictured or listed in description. If in doubt, please contact us before purchasing. Click an Image to Enlarge Particle Measuring Systems Vaculaz Interface Module Sensor Tester Analyzer Model: Vaculaz Dimensions(L”xW”xH” 10.5*11.5*3.5 As a large liquidator for many vendors. Our rating system is as follows. On a scale from 1- 10. With 10 being in new or excellent condition, this item is rated as a 8. SEE PHOTOS. All images taken in house of the unit(s) being sold. Except for multiple quantities where item received will be in similar or better condition. Please review images thoroughly before purchasing. Additional information may be found searching online. We do not have additional info. Only pictured items will be included. All parts. Including accessories and cables are only in cluded if pictured or listed in the description. All pictures are taken in house. If you require more information. Please contact the manufacturer and/or research online. As a large liquidator, we do not carry additional information beyond what has been provided to us above. This FDA DISCLAIMER is for MEDICAL DEVICES only and not for all our products: The sale of this item may be subject to regulation by the U.S. Food and Drug Administration and state and local regulatory agencies. If so. Do not bid on this item unless you are an authorized purchaser. If the item is subject to FDA regulation, we will verify your status as an authorized purchaser of this item before shipping of the item. This unit has been used. It has been cleaned in accordance with the manufacturers guidelines by the medical facility from which we received it. Our Contact: SVC ASSET MANAGEMENT. INC. 1096 PECTEN CT MILPITAS. CA 95035 Open Monday thr
$
15000.00
Buy It Now
Condition: For parts or not working
Location: Saint-Égrève, France
P/N OEM DP2000. We will find it for you! 40-30 also proposes maintenance services (vacuum, RF, electronics and cleaning technologies), training, IT applications ... moreand engineering. With electrical Cabinet.
1
 In 

Former Listings  
 
Nordson MARCH C-Series Plasma Treatment System, Vacuum Etcher: Aluminum Chamber
You are bidding on a Nordson MARCH C-Series plasma treatment system being sold as is. As pictured, with computer but no pumps, no power supplies. Made for large-scale industrial plasma treatment applications with 36x38x48 inch inside dimension aluminum holding chamber. PTB packs parcel shipments utilizing foam in place packaging with care. We ship heavy items(we draw the line at 100 lbs in most cases) boxed and strapped to a pallet. We will bill shipments to your shipping account or add into the invoice total. We accept returns if specified in the Return Policy otherwise they are sold as is with no return. We will refund or exchange an item after it is returned and the shipping paid by the buyer. We ship using FedEx. UPS or other requested agents but not the USPS. 626-334-0500 1331 Mountain View Circle Azusa. CA 91702.RcmdId ViewItemDescV4,RlogId ... morep4%60bo7%60jtb9%3Fuk.rp*3A%3Cd%3Ff6%3E-13e3446599a-0xf3-
Balzers BAK 550 Vacuum Deposition Chamber, Serial # 2166
You are bidding on a Balzers BAK 550 chamber. Serial# 2166. This is a bare chamber with no pumps. PTB packs parcel shipments utilizing foam in place packaging with care. We ship heavy items(we draw the line at 100 lbs in most cases) boxed and strapped to a pallet. We will bill shipments to your shipping account or add into the invoice total. Our preferred carrier is FedEx. 626-334-0500 1331 Mountain View Circle Azusa. CA 91702
Aluminum Vacuum Chamber: 38" diameter
You are bidding on an aluminum vacuum chamber: 38" diameter x 44 inch cylinder inside dimensions. PTB packs parcel shipments utilizing foam in place packaging with care. We ship heavy items(we draw the line at 100 lbs in most cases) boxed and strapped to a pallet. We will bill shipments to your shipping account or add into the invoice total. Our preferred carrier is FedEx. ptb-sales.com 626-334-0500 1331 Mountain View Circle Azusa. CA 91702.RcmdId ViewItemDescV4,RlogId p4%60bo7%60jtb9%3Fvo%7B%3Dd70f%2Bf%60%60%3E-13e9f956d39-0x100-
Vacuum Chamber with Pfeiffer turbopump, MDC gate valve, manipulator, and more
This is a custom made stainless steel vacuum chamber built around a 6-way hub. All 4" ID and conflat metal seals on the main components. It includes the following major components: One(1) Pfeiffer TMU261 P. DN 100 CF-F, 3P, model# PM P02 826 B, 210 l/s turbopump, without controller or backing pump. One(1) MDC manually-operated gate valve. Model GV-4000M, serial# 02-2394-G One(1) MDC linear sample manipulator. Model RPLM-275-6, serial# 666005 Many more small parts. Flanges, a hinged viewport door(o-ring sealed) etc. Six smaller ports focus in at the sample position. Maybe to accommodated some kind of beam treatment. The chamber has no residue inside, and looks like it was never put into service. It's a little bit of a mystery, but with top of the line components. The whole thing weighs over 120 lbs. So gross shipping weight will be ... morein the neighborhood of 180 lbs. It will ship anywhere in the USA completely wrapped and on a pallet for $250, or you can come pick it up yourself at our warehouse in Santa Barbara. We will consider requests to part it out. Or sell parts of it, based on a reasonable offer. This item, and its individual components are being sold"As-Is" with no guarantee implied or expressed. All sales are final, and returns will not be accepted, so ask any questions before buying.
Brooks Automation 200mm wafer vacuum transport chamber w/ robot and aligner
This unit was part of an Aviza Celsior ALD system which was recently decommissioned and dismantled. The system was put together in 2007 and was only lightly used. All of the components on this chamber are in like-new condition. And it is ready to be used in a new cluster tool. Besides the chamber. There is a Brooks Automation atmospheric wafer robot arm, a wafer aligner, and a variety of vacuum gauges and valves. The cluster tool this unit came from was being used with had four process modules, and so four sides of the chamber are furnished with VAT gate valves. The unused wafer ports are covered with polycarbonate windows. This chamber is very heavy. And my current best guess for the weight is approximately 3000 lbs. I will get a better estimate for shipping before the auction ends. The buyer will need to arrange their own freight shipping.
Brooks 200 mm Gemini Express Cluster Vacuum Chamber w/ wafer robot and aligner
This unit is a Brooks Gemini Express AFE 6000 Bridge Cluster Tool Platform It is equipped with an AcuTran 7 atmospheric robot and an AcuLine 7 aligner. The system also has Series 031 MONOVAT classic pneumatic gate valves. This unit was part of an Aviza Celsior ALD system which was recently decommissioned and dismantled. The system was put together in 2007 and was only lightly used. All of the components on this chamber are in like-new condition. And it is ready to be used in a new cluster tool. Besides the chamber. There is a Brooks Automation atmospheric wafer robot arm, a wafer aligner, and a variety of vacuum gauges and valves. The cluster tool this unit came from was being used with had four process modules, and so four sides of the chamber are furnished with VAT gate valves. The unused wafer ports are covered with polycarbonate windows. ... moreThis chamber is very heavy and the total weight is approximately 3500 lbs. The buyer will need to arrange their own freight shipping.
AMAT Vacuum Chamber Indexer Basic Indexer Lift 0010-76317
Applied Materials: Vacuum Chamber Indexer. No part number on Indexer. AMAT Vacuum Chamber Indexer Some switch sheet metal damage from handling. As in Photos. I will ship on your account. Check out my! SER.
AMAT 0240-70904 Vacuum Chamber Indexer System P631 NENP LLK RHS LLK B 0010-76317
Applied Materials: 0240-70904 Vacuum Chamber Indexer. System: P631 NENP LLK RHS Sn: 28599744 Some switch sheet metal damage from handling. As in Photos. I will ship on your account. Check out my! SER.
AMAT Vacuum Chamber Indexer Basic Indexer Assembly Lift Index 0020-21956 EEP-F-3
Applied Materials: Vacuum Chamber Basic Indexer Assembly. No assembly part number. Part numbers on components: Z-Flange adapter: 0020-21956 EEP-F-360 Bellows. Actuator: VA22-XX2-B15 Drive motor assy: 0010-0076430 Limit switch actuator bracket: 0020-21886 Brake: 0090-00768 Brake mounting bracket: 0020-40085 Rev B Housing: 0020-21948 D 380-026MAGIC06403 Flexure Unit: 0020-75162 C End of ball screw to near side of the housing: 14 inches. Some surface irregularity on center shaft. As is. Check out my! SERRCLL.
AMAT 0010-76697 E/C Indexer Standard Vacuum Chamber Indexer Assembly Lift Index
Applied Materials: 0010-76697 E/C Standard Indexer Assembly. Part numbers on components: Mounting Flange: MAC-E-316 Drive motor assy: 0010-20125 Brake: 0090-20012 Housing: 0020-20756 Aluminum side rails: 466-MAC-B End of ball screw to near side of bearing housing: 14 inches. Center Shaft Length: 28 1/2 inches. AMAT Papers with assembly. Date: 7/7/97 As is. Check out my! SERRCLL.
AMAT Vacuum Chamber Cass Basic Indexer Magic Elevator 0020-21984 0010-76430
No part number for the assembly. AMAT Vacuum Chamber Indexer Basic Indexer Assembly. Bellows. Actuator: VA22-XX2-B15 Sn: 107277-4/00 Applied Materials: Vacuum Chamber Basic Indexer Assembly. Z-Flange adapter: 0020-21956 Housing Pn: 0020-04327 220 098 Magic 04327 Lift motor: 0010-76430 Brake: 0090-20012 Center shaft Over-all length: 21 1/2" Over-all length: 27" Ball screw length: 17 1/2" I will ship on your shipping account. Check out my! SERRCLL.
SVG 9037S 28-543013-01-001 13-47454-01 99-47467-01 SVG90 VACUUM BAKE CHAMBER
SVG 9037S 28-543013-01-001 13-47454-01 99-47467-01 SVG90 VACUUM BAKE CHAMBER SVG Silicon Valley Group MODEL: 9037S PN: 28-543013-01-001 13-47454-01 99-47467-01 SVG90 VACUUM BAKE CHAMBER