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Reaction Chamber CC1106-01301 (?) Top Assembly For Tegal 901e 903e DQ-5-001
$
6500.00
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$170.80 Shipping
Condition: Used
Location: Morgan Hill, United States
Reaction Chamber CC1106-01301 (?). Top Assembly For Tegal 901e 903e DQ-5-001.
Tegal 39-334-010 Gas Ring. Rev,C
$
1320.00
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$18.50 Shipping
Condition: New – Open box
Location: Milpitas, United States
Tegal 39-334-010 Gas Ring.
TEGAL 80-202-291
$
20.00
Buy It Now
$2.50 Shipping
Condition: New – Open box
Location: Milpitas, United States
New TEGAL Spare Part.
TEGAL 80-202-361 Bearing
$
20.00
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$4.50 Shipping
Condition: New – Open box
Location: Milpitas, United States
New TEGAL 901/903 Bearing.
TEGAL 83-099-001 Lift Pin 3ea
$
50.00
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Free Shipping
Condition: New – Open box
Location: Milpitas, United States
New TEGAL Lift Pin.
TEGAL Display CD 1049-00102, 99-125-003 / 03601-22-040 for Tegal 901e / 903e
$
200.00
Buy It Now
$17.50 Shipping
Condition: Used
Location: Milpitas, United States
TEGAL Displayfor Tegal 901e / 903e. Item CD 1049-00102, 99-125-003 / 03601-22-040.
Tegal CE00843 2 CTS MALE PLUG S 104 A051-130
$
50.00
Buy It Now
$22.88 Shipping
Condition: New – Open box
Location: Austin, United States
These products are subject to export restrictions under U.S. law. Item Condition: NEW, OPEN BOX, as seen in pictures.
Tegal 39-680-003 Showerhead Electrode Cone Head Vented for 903e
$
80.00
Buy It Now
$24.74 Shipping
Condition: New
Location: San Jose, United States
Local pickup in San Jose CA.
Tegal CM05346 POT, 10K, 10 TURN, SOURCE MATCH (PKG 2)
$
50.00
Buy It Now
$22.88 Shipping
Condition: New – Open box
Location: Austin, United States
These products are subject to export restrictions under U.S. law. Item Condition: NEW, OPEN BOX, as seen in pictures.
Tegal CE00840 WDE 103 ZA053-600
$
50.00
Buy It Now
$22.88 Shipping
Condition: New – Open box
Location: Austin, United States
These products are subject to export restrictions under U.S. law. INTERNATIONAL EXPORT POLICY.
Tegal 99-086-001 PCB AUTOTUNE AOT-1
$
400.00
Buy It Now
$155.00 Shipping
Condition: New
Location: Milpitas, United States
Tegal PCB AUTOTUNE AOT-1. Tegal p/n: 99-086-001.
Tegal MX01136 PHYTRONIC ASSEMBLY ESCP SH (PKG 4)
$
50.00
Buy It Now
$22.88 Shipping
Condition: Used
Location: Austin, United States
Item Condition: USED, as seen in pictures. INTERNATIONAL EXPORT POLICY.
Tegal SPI-80-095-057 Probe Temperature SST
$
80.00
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$16.23 Shipping
Condition: Used
Location: San Jose, United States
Tegal Type 80-202-186 Timing Belt (Pack Of 4)
$
24.25
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Free Shipping
Condition: New – Open box
Location: Hudsonville, United States
Tegal CE00839 2 PINS WIDE 104ZA051 FEEDTHROUGH
$
50.00
Buy It Now
$22.88 Shipping
Condition: New
Location: Austin, United States
These products are subject to export restrictions under U.S. law. INTERNATIONAL EXPORT POLICY.
Tegal TR01785 PIPE ALUMINA INTEGRATED CIRCUIT SUPPORT ICS-2471883
$
50.00
Buy It Now
$22.88 Shipping
Condition: New – Open box
Location: Austin, United States
These products are subject to export restrictions under U.S. law.
Tegal CE00842 4 CTS FEMALE PLUG S 103 Z053-1
$
50.00
Buy It Now
$22.88 Shipping
Condition: New – Open box
Location: Austin, United States
These products are subject to export restrictions under U.S. law. Item Condition: NEW, OPEN BOX, as seen in pictures.
TEGAL 33-337-001 INNER BELLOWS
$
520.00
Buy It Now
$17.50 Shipping
Condition: New – Open box
Location: Milpitas, United States
New TEGAL INNER BELLOWS.
Tegal 81-105-223 Heater 120V 60Hz - Lot of 2
$
60.00
Buy It Now
$16.23 Shipping
Condition: New
Location: San Jose, United States
Inventory Code: TC-TK-4324-1.
Tegal 903e Tegal 901e Ceramic Ring For 4 Inch Chuck , 40-294-003 ?
$
300.00
Buy It Now
$40.83 Shipping
Condition: Used
Location: Morgan Hill, United States
Photos are for 4 pieces. The price is for one.
Tegal 903E CW 1078-40203 Send/Receive Sender/Receiver Spatula Drive/Driver
$
749.99
Buy It Now
$196.71 Shipping
Condition: For parts or not working
Location: Phoenix, United States
Tegal 903E CW 1078-40203 Send/Receive Spatula Drive/Driver. Part Number: CW 1078-40203. Specifications are from a 3rd party and may vary slightly due ... moreto upgrades, options, or revisions this unit may or may not have.
Tegal 99-126-006 Interface Board PCB ICG-6 Untested AS-IS
$
152.59
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Free Shipping
Condition: For parts or not working
Location: Albuquerque, United States
This Tegal 99-126-006 Interface Board PCB ICG-6 is used untested surplus and is being sold as-is. The physical condition is good, but there are signs ... moreof previous use and handling. Item Condition: Untested, Sold As-Is.
80-200-177 SHAFT, PRCN, 3/8DIA 19~3/8 for Tegal 901e Tegal 903e Plasma Etcher
$
750.00
Buy It Now
$47.53 Shipping
Condition: Used
Location: Morgan Hill, United States
It is subject to prior sale without notice.
80-200-144 Bushing Ball, 3/8B for Tegal 901e Tegal 903e Plasma Etcher
$
125.00
Buy It Now
$47.53 Shipping
Condition: Used
Location: Morgan Hill, United States
It is subject to prior sale without notice.
CW1078-60401 Spatula Drive, Module 6” for Tegal 901e Tegal 903e Plasma Etcher
$
16500.00
Buy It Now
$266.41 Shipping
Condition: Used
Location: Morgan Hill, United States
It is subject to prior sale without notice.
CE1004-00901 Power Supply. for Tegal 901e Tegal 903e Plasma Etcher
$
14500.00
Buy It Now
$266.41 Shipping
Condition: Used
Location: Morgan Hill, United States
For Tegal 901e Tegal 903e Plasma Etcher. Condition: Used. Tested, working.
0994-60005 O-ring for Matrix 105 Plasma Asher Descum
$
35.00
Buy It Now
$47.53 Shipping
Condition: Used
Location: Morgan Hill, United States
It is subject to prior sale without notice.
0994-60063 O-ring for Matrix 105 Plasma Asher Descum
$
955.00
Buy It Now
$47.53 Shipping
Condition: Used
Location: Morgan Hill, United States
It is subject to prior sale without notice.
0995-16527 Clippard Valve for Matrix 105 Plasma Asher Descum
$
165.00
Buy It Now
$47.53 Shipping
Condition: New
Location: Morgan Hill, United States
It is subject to prior sale without notice.
0994-60050 O-ring for Matrix 105 Plasma Asher Descum
$
45.00
Buy It Now
$47.53 Shipping
Condition: Used
Location: Morgan Hill, United States
It is subject to prior sale without notice.
Tegal CM05473 BELT TIMING BROOKS MX600 116GRV LOAD LOCK
$
50.00
Buy It Now
$22.88 Shipping
Condition: Used
Location: Austin, United States
These products are subject to export restrictions under U.S. law. INTERNATIONAL EXPORT POLICY.
Top Electrode , For Tegal 903e Tegal 901e Plasma Etcher
$
500.00
Buy It Now
$53.96 Shipping
Condition: Used
Location: Morgan Hill, United States
The price is for one.
Tegal 30-251-001 RF Conn Assy - Lot of 4
$
60.00
Buy It Now
$16.23 Shipping
Condition: New
Location: San Jose, United States
Inventory Code: TC-TK-4323-1.
Tegal 903e Tegal 901e Shower Head OEM PN 39-680-003
$
195.00
Buy It Now
$44.90 Shipping
Condition: Used
Location: Morgan Hill, United States
Condition: Used. Good condition.
TEGAL 99-214-003 / G AME-3
$
165.00
Buy It Now
$17.50 Shipping
Condition: New – Open box
Location: Milpitas, United States
Tegal CM04345 POTENTIOMETER MONOTURN 10K 1 TURN BIAS MATCH
$
50.00
Buy It Now
$22.88 Shipping
Condition: New – Open box
Location: Austin, United States
These products are subject to export restrictions under U.S. law. Item Condition: NEW, OPEN BOX, as seen in pictures.
Tegal 99-126-005 PCB for 901E and 903E
$
199.00
Buy It Now
$15.50 Shipping
Condition: Used
Location: San Jose, United States
Tylan 2900 Series SF6 25 SCCM , MFC,Tylan,From Tegal Matrix DX-1-4-011
$
550.00
Buy It Now
$38.91 Shipping
Condition: Used
Location: Morgan Hill, United States
Condition: Used, good condition! We did not test it. We sell it at AS IS,WHERE IS without warranty.Valid Time: Subject to prior sale without noticeReturn: ... moreN/ASales Tax(Only for buyers from California, U.S.A.): We will charge the sales tax separately for end users in California, USA. Please send us resale certification if you want to waive sales tax
Tegal CE00845 CABLE CLAMP E3 103.6/6.7 103.1
$
50.00
Buy It Now
$22.88 Shipping
Condition: New – Open box
Location: Austin, United States
Item Condition: NEW, OPEN BOX, as seen in pictures. INTERNATIONAL EXPORT POLICY.
MKS MFC 1179A22646 N2 10 SCCM , From Tegal 901e 903e Plasma DX-1-3-029
$
750.00
Buy It Now
$38.91 Shipping
Condition: Used
Location: Morgan Hill, United States
Condition: Used, good condition! We did not test it. We sell it at AS IS,WHERE IS without warranty.Valid Time: Subject to prior sale without noticeReturn: ... moreN/ASales Tax(Only for buyers from California, U.S.A.): We will charge the sales tax separately for end users in California, USA. Please send us resale certification if you want to waive sales tax
Tegal 903e Tegal 901e Ceramic Ring For 4 Inch Wafer? Plasma Etcher
$
500.00
Buy It Now
$38.91 Shipping
Condition: Used
Location: Morgan Hill, United States
Plasma Etcher. The price is for one.
Tylan 2900 Series He 200 SCCM , MFC,Tylan,From Tegal Matrix DX-1-4-012
$
550.00
Buy It Now
$38.91 Shipping
Condition: Used
Location: Morgan Hill, United States
Condition: Used, good condition! We did not test it. We sell it at AS IS,WHERE IS without warranty.Valid Time: Subject to prior sale without noticeReturn: ... moreN/ASales Tax(Only for buyers from California, U.S.A.): We will charge the sales tax separately for end users in California, USA. Please send us resale certification if you want to waive sales tax
39-741-011 ELECTRODE,LOWER 4"
$
1950.00
Buy It Now
Free Shipping
Condition: New – Open box
Location: Oak Park, United States
39-741-011 ELECTRODE,LOWER,4"
FC-280 SAV SF6 15 SCCM , Tylan,From Tegal Matrix Plasma DX-4-033
$
275.00
Buy It Now
$38.91 Shipping
Condition: Used
Location: Morgan Hill, United States
Condition: Used, good condition! We did not test it. We sell it at AS IS,WHERE IS without warranty.Valid Time: Subject to prior sale without noticeReturn: ... moreN/ASales Tax(Only for buyers from California, U.S.A.): We will charge the sales tax separately for end users in California, USA. Please send us resale certification if you want to waive sales tax
FC-280 SAV N2 300 SCCM , Tylan,From Tegal Matrix Plasma DX-1-3-019
$
275.00
Buy It Now
$38.91 Shipping
Condition: Used
Location: Morgan Hill, United States
Condition: Used, good condition! We did not test it. We sell it at AS IS,WHERE IS without warranty.Valid Time: Subject to prior sale without noticeReturn: ... moreN/ASales Tax(Only for buyers from California, U.S.A.): We will charge the sales tax separately for end users in California, USA. Please send us resale certification if you want to waive sales tax
RF Match Box for Tegal 803
$
500.00
Buy It Now
$25.00 Shipping
Condition: Used
Location: Santa Clara, United States
Tegal TG00461 MONOBLOCK CENETRING RING CERAMIC PART
$
500.00
Buy It Now
$23.11 Shipping
Condition: New – Open box
Location: Austin, United States
These products are subject to export restrictions under U.S. law. Item Condition: NEW, OPEN BOX, as seen in pictures.
Tegal 40-140-003D, Ring, Insultator, Ceramic, 410361
$
1762.50
Buy It Now
$27.67 Shipping
Condition: New
Location: Milpitas, United States
Tegal 40-140-003D, Ring, Insultator, Ceramic, Farmon ID 410361. Fastcom Faulhaber Federal Pioneer Federal Products Co. Futaba Futurestar Galil Motion ... moreGaSonics Gast GasTech Gaston Gates GC Valves GD California GE Fanuc GE General Electric GE Industrial Services Gems Sensors GEMU General Monitors General Precision General Scanning Genie Industries Genmark Automation GenRad Genwac Georg Fischer Geotest Gespac GF Signet Glassman Glentek Global Laser Gluton West Go Inc.Gould GPI General Precision GPI General Precision Inc.
Tegal 903e Tegal 901e Shower Head 37-221-001 (TSI-TG221-001)
$
299.00
Buy It Now
$44.90 Shipping
Condition: Used
Location: Morgan Hill, United States
Tegal 903e Tegal 901e Shower Head Profacture PRO-37-221-001 Made In USA. Condition: Used. Good condition. Location: CC-3/4-004.
Tegal Gas DLVY CG11015-01102 W/ UFC-1100 UFC-1020 UFC-1 500A MFC ,901e 903e Etch
$
2750.00
Buy It Now
$166.16 Shipping
Condition: Used
Location: Morgan Hill, United States
Tegal Gas DLVY CG11015-01102 W/ UFC-1100 He 100 sCCM, UFC-1020 SF6 5 sccm, UFC-1 500A CHF3 60 sccm?. UFC-1020 sF6 15 sccm MFC ,901e 903e Etch. Located ... moreat A. ID: AWR-040-AA-8-003.
Tegal CE00841 2 CTS FEMALE PLUG S 104 Z051-1
$
50.00
Buy It Now
$22.88 Shipping
Condition: New – Open box
Location: Austin, United States
These products are subject to export restrictions under U.S. law. Item Condition: NEW, OPEN BOX, as seen in pictures.
Tegal CE00845 CABLE CLAMP E3 104.3/6.7 + B I
$
50.00
Buy It Now
$22.88 Shipping
Condition: New – Open box
Location: Austin, United States
Item Condition: NEW, OPEN BOX, as seen in pictures. These products are subject to export restrictions under U.S. law.
Tegal TR05113 CONNECTOR HELIUM ESCP SH (PKG 2)
$
50.00
Buy It Now
$22.88 Shipping
Condition: New – Open box
Location: Austin, United States
These products are subject to export restrictions under U.S. law. INTERNATIONAL EXPORT POLICY.
Tegal CE00844 4 CTS MALE PLUG S 103 A053-130
$
50.00
Buy It Now
$22.88 Shipping
Condition: New – Open box
Location: Austin, United States
These products are subject to export restrictions under U.S. law. Item Condition: NEW, OPEN BOX, as seen in pictures.
Tegal Gas DLVY CG1145-01801 W/ UFC-8100 UFC-1660 UFC-1100A MFC ,901e 903e
$
4550.00
Buy It Now
$166.16 Shipping
Condition: Used
Location: Morgan Hill, United States
Tegal Gas DLVY CG1145-01801 W/ UFC-8100 He 200 SCCM, UFC-1660 SF6 15 SCCM, UFC-1100A cHF3 50 sccm, N2 15 sccm MFC ,901e 903e plasma etching etcher. Located ... moreat A. ID: AWR-040-AA-003.
FC-2900, Tylan,Unit UFC-1100 MFC,From Tegal Matrix Plasma DX-1-3-033
$
925.00
Buy It Now
$64.81 Shipping
Condition: Used
Location: Morgan Hill, United States
Include :UFC-1100 cHF3 50 sCCMTylan FC-2900 sF6 25 sccm Tylan FC-2900 O2 100 sccm Tylan FC-2900 He 200 sccm Condition: Used, good condition! We did not ... moretest it. We sell it at AS IS,WHERE IS without warranty.Valid Time: Subject to prior sale without noticeReturn: N/ASales Tax(Only for buyers from California, U.S.A.): We will charge the sales tax separately for end users in California, USA. Please send us resale certification if you want to waive sales tax
80-202-357 O RIng for Tegal 903e Tegal 901e
$
125.00
Buy It Now
$38.91 Shipping
Condition: Used
Location: Morgan Hill, United States
O-R SILC GRY 6 3/4ID 1/4W D40. See the O Ring in the photo. Minimum order is 10PC.
Tegal M3 X 16MM SCREW BUTON HEAD STAINLESS STEEL CLS. .3C16BHCS
$
50.00
Buy It Now
$22.88 Shipping
Condition: New – Open box
Location: Austin, United States
These products are subject to export restrictions under U.S. law. Item Condition: NEW, OPEN BOX, as seen in pictures.
TEGAL 99-214-003RW Rev. A RWK-PCB ANE-3 AUTOTUNE 3
$
185.00
Buy It Now
$17.50 Shipping
Condition: New – Open box
Location: Milpitas, United States
Tegal 98-354-002 CPU Transition Board VME PCB Card Used Working
$
712.18
Buy It Now
Free Shipping
Condition: Used
Location: Albuquerque, United States
The physical condition is good, but there are signs of previous use and handling. These products are subject to export restrictions under U.S. law.
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